介质阻挡放电及其应用.pdfVIP

第 35 卷 第 1 期 高 　电　压 　技 　术 Vol . 35 No . 1 2009 年 　　1 月 High Volt age Engineering J an . 　2009 ·1 · 介质阻挡放电及其应用 王新新 清华大学电机系 ,北京 100084 摘 　要 : 为使读者比较全面地了解介质阻挡放电,根据气体放电理论和实验结果 ,对介质阻挡放 电进行了综述 。 首先提出了只有拍摄曝光时间为 10 n s 左右的放电图像才能判断放电是否为均匀放电,即使是均匀放电,也不能统 称其为大气压辉光放电,还必须进一步区分它是辉光放电还是汤森放电。其次 ,说明了只有增加放电的种子电子 , 使放电在低电场下进行才有可能实现大气压下均匀放电。最后 ,根据放电图像 、电流电压波形 、数值模拟结果 ,证 明了大气压氦气均匀放电为辉光放电,而大气压氮气均匀放电为汤森放电。最后还简要介绍了 3 种介质阻挡放电 的主要工业化应用 —大型臭氧发生器 、薄膜表面的流水线处理 、等离子体显示屏 。 关键词 : 介质阻挡放电; 大气压辉光放电; 汤森放电; 辉光放电; 气体放电; 等离子体表面处理 中图分类号 : TM2 13 ; TM89 文献标志码 : A 文章编号 : 2009 0 1000 111 Dielectric Barrier Discharge and Its Appl ications WAN G Xinxin Dep art ment of Elect rical Engineering , Tsin ghua U niver sit y , Beij ing 100084 , China Abstract : In or der to comp rehen sively under st and DBD , we reviewed t he investigation s of dielect ric barrier di scharge DBD by focu sing on t he p hy sics relat ed to t he uniform di scharge at at mo sp heric p ressure . It i s suggest ed t hat t he best way to di stingui sh a uniform di schar ge f rom a filament ary one i s to t ake a pict ure wit h an expo sure time of about 10 n s. Even for a real uniform di schar ge , it i s import ant to furt her di stingui sh a glow di schar ge f rom a Town send di schar ge . The only way to get a uniform di schar ge at at mo sp heric p ressure i s to make t he di schar ge at a lower elec t ric field by increa sing t he seed elect ron s initiating t he di schar ge . Recently , t he uniform di schar ges at at mo sp heric p ressure have been obt ained in helium and nit ro gen , i . e . , subnormal glow di schar ge in helium and Town send di s char ge in nit ro gen . Moreover , we briefly int roduced t hree indu st rial application s of DBD plasma s , including t he ad vanced ozone generator , continuou s doublesided t reat ment of foil surface , plasma di splay p anel . Key words : dielect ric barrier di schar ge ; at mo sp heric p ressure glow di