inasgasb超晶格结构制备及性质研究-preparation and properties of inas gasb superlattice structure.docx

摘要2～5μm 波段内的激光由于具有较低的散射与吸收，因而在空间点对点通信、激 光雷达、军事目标指示方面拥有重要的应用前景。锑化物有源区的激光器是获得该波 段的一种最热门的方式，但在制备上还存在晶格的失配、应力影响锑化物发展。因此 本文研究了同质外延生长单层薄膜（GaSb 衬底生长 GaSb 薄膜）和异质外延生长超晶 格（GaSb 衬底生长 InAs/GaSb 超晶格）及其性能表征，在超晶格周期内部材料界面 之间进行界面控制，提高超晶格性能。采用实验结果与 X’Pert Epitaxy 软件模拟材料外延生长的图像相对比的方法，利 用分子束外延技术将选取的 GaSb 衬底上控制生长参数生长 GaSb 薄膜。运用 XRD 测 量实际生长薄膜，明显看出峰形尖锐。与模拟外延生长图像几乎吻合，说明外延薄膜 的晶格质量很好，从而确定了最佳的生长参数。利用已确定的分子束外延技术的最佳生长参数生长了周期分别为 10,20,50 的 InAs/GaSb 超晶格，测得 X 射线一级衍射峰半峰宽分别为 303arcsec，198arcsec， 208arcsec。表明 InAs/GaSb 超晶格随着周期增大应变也随着增加，但是通过适当生长 参数的控制周期的增加界面的应力也逐渐的减小。在 InAs/GaSb 界面插入 InAsSb 缓 冲层，测得 X 射线一级衍射峰半峰宽为 200arcsec。插入缓冲层会降低界面处的失配 密度。得到了稳定、失配，应力低的 InAs/GaSb 超晶格结构。关键字：分子束外延GaSb 薄膜InAs/GaSb 超晶格X 射线衍射模拟ABSTRACT2.5μm Laser in those two particular band possess the property of lower scattering and absorbability, which have application prospect in spatial point to point communication, ladar and the indication of military target. Presently semiconductor laser that use antimonide as its active material is the most popular way to gain infrared light. There are still some serious questions such as lattice mismatch and stress problems. In the process of martial growth, the lining-up of antimonide will ultimately affect the development of antimonide. Therefore, this paper provides a comprehensive review of research on the homoepitaxial growth of monolayer film and the heteroepitaxial growth of superlattice. We also analyze the features of martials characteristics and then to perform interface control of inside material interface superlattice cycle，and finally to improve the performance of semiconductor ladar .By comparing the experiment result with the image of epitaxial growth imitated by the X’Pert Epitaxy software, By MBE apparatus on GaSb substrate Home-epitaxial growth GaSb single layer. Using XRD, grown GaSb monolayer which is a very sharp peak.GaSb substrate GaSb film epitaxially double-crystal X-ray diffraction rocking cure fitting the same conditions X’Pert Epitaxy softwave simulation map. This res