多功能激光修调系统的研制-材料加工工程专业论文.docxVIP

华 华 中 科 技 大 学 硕 士 学 位 论 文 I I 摘 要 随着微电子技术的蓬勃发展，各种电子类产品正以惊人的速度向小型化发展， 薄厚膜混合集成电路作为微电子技术的一个重要组成部分已经运用到各类电子产品 中，而激光修调系统是生产薄厚膜混合集成电路的关键。 本文围绕多功能激光修调系统的组成，介绍了激光控制与定位系统、机械运动系 统、电阻及温度测量系统、用户使用系统，此外本文还对激光修调的一般切割形式 进行了研究。 对于激光控制与定位系统、机械运动系统、电阻及温度测量系统，本文从功能、 组成部分以及连接方式等方面进行了介绍。 用户使用系统是使上述各个系统协调工作的关键，它主要包括命令系统和界面 系统。本文首先对命令系统的各个命令进行了介绍，然后给出了具体的使用命令的 实例。界面系统由主界面、命令编辑界面、系统设置界面、测量设置界面、文字打 印与编辑设定界面组成，本文详细介绍了各个界面的组成部分、功能和使用方式。 激光修调一般采用 I、L、D、U、M 形式进行，通过了解各种切割形式时的电阻 变换规律，设计了各种形式时的修调命令，给出的命令的控制方式。此外对于复杂 的两个电阻并联的厚膜电阻，当其要求修调后电流密度较好时，采用实验的方法， 研究了 U 形修调方式时横向切割和纵向切割的电阻变换规律，并建立了拐点与初始 电阻的关系，根据此关系，设计了适用于并联电阻且有均匀电流密度要求的激光修 调命令。 关键词：激光修调；修调形式；命令 II II Abstract With the quick development of electronic technology, all kinds of electronic products are becoming smaller and smaller. As a part of micro-electronic technology, the technology of film hybrid IC has been used in all kinds of products. And laser trim system is the key to make film hybrid IC. According to the systems of multi-functional laser trim system, system of laser control and location, system of mechanical movement, system of temperature and resistor test are introduced. Some trimming styles are also introduced in the paper. For system of laser control and location, system of mechanical movement, system of temperature and resistor test, the function, elements, line connection are introduced. The system of user is the key to keep the systems above woke smoothly. It contains command system and interface system. All commands are introduced first and then an example is given. The interface system are made of sub interface, command edit interface, system set system, test set system, text print and set system which are introduced from elements, function, use method in the paper. I, L, D, U, M are the typical style used in laser resistor trimming. After study of the relation between trimming style and resistor the commands for I, L, D, U, M trimming styles are designed. For the commands the paper also gives an introduction of the control w