高校——Design analysis on kinematicsdynamics of direct drive aerostatic slideways in a multi-physics simulation environment-Torhp.pdfVIP

Dynamics Design and Analysis of the Direct Drive Aerostatic Slideway in a Multi-Physics Simulation Environment 1 2 Tianjian Li , Hongpin Ren 1 School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai, China 2 Dassault Systèmes, Shanghai, China E-mails: litianjian99@163.com Abstract: Direct drive aerostatic slideways are working in the multi-physic environment coupling with the electrical actuation, heat, force and pressured airflow conditions. In this paper, the relationship on multi-physics coupling data within the design and analysis of the direct drive aeroatatic slideway has been investigated, and the corresponding multi-physics based design and analysis platform has been developed so as to obtain the optimal performance of the slideway at nanometric accuracy in dynamic working conditions. The fluctuate characteristics of slideways together with load, multiple heat sources and gas fluid environment have been investigated using the platform. Microscopic deformations of the slideway interacted with varied film thickness and temperature have been identified. Main difference caused by multi-physics interaction in design nominal value is analyzed and compared with non-coupling design and test data. The analytical approach used in the research together with the predicted results is in accordance with reality in case study. It shows that the proposed investigation scheme is efficient in identifying the transient deviation on bearing capacity, stiffness of slideway, micro-morphology of floating surface and its magnitudes such as thermal deformation of slideways. The multi-physics simulation environment is essential to realize the seamless integrated design and analysis of ae