真空基础术语.pdfVIP

1. 1.1 standard ambient condition 20 65% 101325Pa=1013.25mbar=760Torr 1.2 standard reference conditions for gases 0 101325Pa 1.3 p pressure “” 1.4 Pa pascal1Pa=1N/m2 1.5 Torr torr 1Torr=1/760atm 1.6 atm standard atmosphere1atm=101325Pa 1.7 mbar millibar1mbar=102Pa 1.8 partial pressure 1.9 total pressure 1.10 vacuum 1.11 degree of vacuum 1.12 ranges of vacuum Pa Torr 105102 7601 10210-1 110-3 10-110-5 10-310-7 10-5 10-7 1.13 gas “ ” 1.14 non-condensable gas 1.15 vapor 1.16 saturation vapor pressure 1.17 degree of saturation 1.18 saturated vapor 1.19 unsaturated vapor+ 1.20 nm-3 number density of molecules 1.21 ιλm mean free path 1.22 ψ collision rate 1.23 χ volume collision rate 1.24 G quantity of gas 20 2/3 1.25 diffusion of gas 1.26 D diffusion coefficient; diffusivity 1.27 viscous flow 1.28 η viscous factor 1.29 poiseuille flow 1.30 intermediate flow 1.31 molecular flow 1.32 number of knudsen 1.33 molecular effusion; effusive flow 1.34 transpiration 1.35 thermal transpiration 1.36 qN molecular flow rate; molecular flux 1.37 molecular flow rate density; density of molecular flux 1.38 qm mass flow rare Page 1 of 19 1.39 qG throughput of gas 1.40 qV volume flow rate 1.41 qυ molar flow rate 1.42 maxwellian velocity distribution - 1.43 Pc transmission probability 1.44 CN,UN molecular conductance 1.45 C,U conductance 1.46 Ci,Ui intrinsic conductance 1.47 W resistance 1.48 sorption 1.49 adsorption 1.50 physisorption 1.51 chemisorption 1.52 absorption 1.53 α accommodation factor 1.54 υ impingement rate 1.55 condensation rate 1.56 sticking rate 1.57 Ps sticking probability 1.58 τ residence time 1.59 migration 1.60 desorpti