飞秒激光在硅表面微加工的研究文档.pptVIP

* The laser beam approximates to a Gaussian shape for intensity spatial profile. A 5 objective * This interference leads to periodic modulation of the absorbed intensity and consequently to modulated ablation. The thermal annealing, the characteristics of the materials, the re-solidification of molten materials and so on may be responsible for the formation of ripples. * This interference leads to periodic modulation of the absorbed intensity and consequently to modulated ablation. The thermal annealing, the characteristics of the materials, the re-solidification of molten materials and so on may be responsible for the formation of ripples. * The laser beam approximates to a Gaussian shape for intensity spatial profile. A 5 objective * * Micro-Nano Fabricating Measurement Laboratory 实验内容及方法 点：脉冲数，激光能量 线：平台移动速度，重复次数，激光能量 复杂图形：脉冲数，平台移动速度，激光能量，行列间距 * * Micro-Nano Fabricating Measurement Laboratory 测试手段 利用SEM测试加工表面特征 利用AFM测试得到三维形貌特征 利用FIB得到截面特征 光学显微镜 质谱仪 * * Micro-Nano Fabricating Measurement Laboratory 不同的激光参数对加工结构的影响 加工内容：打点、刻线及复杂图案 在打点过程中发现的Ripples现象 Ripples 形成原因、形成过程及影响因素 实验结果及分析 * * Micro-Nano Fabricating Measurement Laboratory 激光脉冲数对点加工的影响 激光辐照在硅（111）表面同样出现了条纹，随着脉冲数的增加条纹逐渐被破坏 N=50 N=100 * * Micro-Nano Fabricating Measurement Laboratory 点结构：激光脉冲数的影响 激光辐照在硅（100）表面 N=200 N=500 N=1000 N=1500 N=1 N=10 N=50 N=100 * * Micro-Nano Fabricating Measurement Laboratory 点结构：脉冲数对烧蚀深度影响 N=50, D= ~5μm N=100, D= ~7.14μm 使用FIB得到截面图 * * Micro-Nano Fabricating Measurement Laboratory 点结构：激光能量的影响 (1) Φ=0.08 J/cm2 (2) 第一行 Φ=0.30J/cm2 第二行 Φ=0.15J/cm2 烧蚀能量越大烧蚀面积越大 N=100 * * Micro-Nano Fabricating Measurement Laboratory 点结构：激光能量的影响 烧蚀能量越大烧蚀面积越大 N=100 * * Micro-Nano Fabricating Measurement Laboratory 点结构总结：激光能量与烧蚀区域直径的关系 Relationship between diameter of the irradiated surface and laser fluences on Silicon * * Micro-Nano Fabricating Measurement Laboratory 线结构：平台运行速度的影响 * * Micro-Nano Fabricating Measurement Laboratory 线结构：重复加工次数的影响 平台移动