测量透明薄膜表面三维轮廓的新型白光干涉法_刘艳.pdfVIP

　 26　 5 ( ) Vo.l 26　No. 5 　　2006 10 JournalofNanjing University of Posts and Telecommunications(NaturalScience) c.t 2006 　　:1673-5439(2006)05-0086-05 刘　艳, 丁万山 , 　210016 　:基于新型的峰值分离算法, 提出了白光干涉法(垂直扫描白光测量法)的一种新的 用———测 量覆盖透明薄膜的物体表面的三维轮廓, 并同时测量出透明薄膜的三维轮廓和厚度信息, 克服了传 统光学非接触测量的缺点, 拓展了白光干涉法的 用领域。这 一技术可用于检测光学厚度约为 1μm 或以上的透明薄膜, 可广泛有效的 用于半导体和 LCD加工制造等需要精细测量的领域。 : 用光学;白光干涉测量;表面三维轮廓;透明薄膜 :439　　　:B 3D ProfileofaTransparentFiml UsingNovelWhite-Light Interferometry LIU Yan, DINGWan-shan College ofAutomation Engineering, N anjingUniversity ofA eronautics andA stronautics, Nanjing210016, China Abstract:Based on the novel peak separation method, this paper presents an new application ofWhite-Light Interferometry(VerticalScanningWhite-LightInterferometry), that is tomeasure the 3-D surface profile of the object covered with a transparent film and to measure the 3-D profile and thicknessof the transparent film synchronously. This new application overcomes the drawback of traditionalopticalnon-contactmeasurement and extends the appl-i cation ofWhite-Light Interferometry. This technique is suitable to transparent filmswith the optical thickness of ap- proximately 1μm or greater, and it is used effectively in the fields requiring precisemeasurement such as sem icon- ductor and LCD manufacturing processes. ey words:Applied optics;White-light interferometry;Surface 3D profile;Transparent film [1] 1　　 ( ), 1980, 。 、 ,, 。, ——— , ,,