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One-step fabrication of tetragonal ZrO2 particles by atmospheric pressure plasma jet》.pdf
Powder Technology 267 (2014) 74–79 Contents lists available at ScienceDirect Powder Technology journal homepage: /locate/powtec One-step fabrication of tetragonal ZrO2 particles by atmospheric pressure plasma jet Yu-Ming Su a, Yu-Lin Kuo a,⁎, Chun-Ming Lin b, Sun-Fen Lee c a Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei 10607, Taiwan b Ira A. Fulton Schools of Engineering, Arizona State University, Tempe, AZ 85287, United States c Opto-electronic Equipment Department, Metal Industries Research Development Centre, Kaohsiung 811, Taiwan a r t i c l e i n f o a b s t r a c t Article history: A novel atmospheric pressure plasma jet (APPJ) was applied to prepare the tetragonal zirconia particles via a so- Received 11 October 2013 lution of zirconyl (IV) nitrate hydrate (ZrO(NO ) xH O) as the precursor. The samples were characterized by X- 3 2 2 Received in revised form 1 July 2014 ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X-ray Accepted 5 July 2014 photoelectron spectroscopy (XPS). The microstructure of zirconia was found to be an assembly of spherical Available online 11 July 2014 particles with a tetragonal structure. The chemical composition of prepared zirconia particles was analyzed by XPS quantification study with an atomic ratio of O/Z
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