ic制造装备的机器视觉检测与定位技术分析-analysis of machine vision inspection and positioning technology of ic manufacturing equipment.docx

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ic制造装备的机器视觉检测与定位技术分析-analysis of machine vision inspection and positioning technology of ic manufacturing equipment.docx

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ic制造装备的机器视觉检测与定位技术分析-analysis of machine vision inspection and positioning technology of ic manufacturing equipment

AbstractWiththerequirementsofintelligenceandhighaccuracyinindustry,anewsubject,machinevision,hasbeenproposed.Andmoreandmoreresearchesonthissubjectarebeingimplemented.Thisthesisdiscusseshardwarestructureandopticalcomponentsselectionofmachinevisionsystem,andresearchestheapplicationofvisualinspectionandlocationonchipsmanufacturingequipment,suchasQFPchiptestequipmentandRFIDtagpackagingequipment.SomeopticalcomponentsareselectedafterrelativecalculationaccordingtotheapplicationrequirementsofRFIDtagpackagingequipment.Thenanewvisionsystemconsistsoftheseopticalcomponentsonthevisiontestplatform.Anumberofexperimentsgivetheevidencesthatprovethevisionsystemcansatisfytheequipment’sdemands.ThisthesisdesignsanautomaticinspectionsystembasedonmachinevisiontoinspecttheappearanceoftheQFPchiplead.Inthisthesis,opticalpathdesignandhardwarestructureareintroducedinbrief.Afterthat,wediscusstheinspectionmethodofstandoffandthedetectingmethodbasedonthree-pointseatingplaneofco-planarity,whicharebothbasededgedetection.Finally,thetestexperimentswithrespecttotheQFPchipvisualinspectionsystemarecarriedout,whichachievessatisfactoryresultsverywell.Thisthesisproposesanewdecision-makingbasedhausdorffdistancematchingalgorithmtomeetthedemandofvisionlocatinginRFIDtagpackagingequipment.Whenonlytranslationoccursbetweenimageandmodel,thereisaprovedinequalityrelatedtohausdorffdistance.Basedonthepropertyofdistanceinequality,thenewmatchingalgorithmisproposed.WithapplyingtothevisionlocatingsystemofRFIDtagpackagingequipment,thealgorithmindicatesagoodrobustnessandefficiencysimultaneously.Keywords:MachineVision;QFPVisualInspection;EdgeDetection;RFIDTagPackaging;HausdorffDistance;ImageMatching目录摘要....................................................................................................................IAbstract.................................................................................................................II1绪论1.1课题来源...............................................................................