建环专业洁净室设计英文文献.pdfVIP

Available online at Energy and Buildings 40 (2008) 1387–1393 /locate/enbuild Saving energy in the make-up air unit (MAU) for semiconductor clean rooms in subtropical areas Jhy-Ming Tsao a, Shih-Cheng Hu a,*, David Yih-Liang Chan b, Rich Tsung-Chi Hsu b, Jane Car-Cheng Lee b a Department of Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology. 1, Sec. 3, Chung-Hsiao E. Rd. Taipei 106, Taiwan b Energy and Environment Research Labs, Industrial Technology Research Institute Bldg 51, 195, Sec. 4, Chung Hsing Rd, Chutung, Hinchu 106 Taiwan Received 15 July 2007; received in revised form 17 December 2007; accepted 25 December 2007 Abstract The energy requirements to cool, dehumidify, preheat and/or humidify outdoor air are significant in the make-up air unit (MAU) of clean room air-conditioning systems, and can represent 30% to 65% of the total thermal energy required to maintain a clean room environment. Because of these high-energy requirements, cost-effective means to reduce energy costs can influence unit production costs. Reducing or displacing mechanical cooling or electrical heating requirements can achieve the greatest opportunity for significant energy savings. This paper, therefore, aims to improve the energy performance of the MAU system by properly arranging compositions of components of a typical MAU applied in a semiconductor clean room. Explicitly, we investigated the influence of various factors includin