带驻留与连续重入的单臂集束型晶圆制造设备调度方法.pdfVIP

Joumal of Southeast University (English Edition) Vol. 29 , No. 2 , pp. 187 -193 June 2013 ISSN 1003一7985 Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous reentrancy Zhou Binghai Wang Zhu Chen Jia (Sch∞1 of Mechanical Engineering, Tongji University , Shanghai 2018ω， αlÍna) Abs位act: In order to enhance the utilization of single-arm the steady state and established an algorithm to search for clusterωols and 句现mize the scheduling problems of dynamic the minimum period , but the calculation is t∞ complex. reaching wafers wi也 residency time and ∞ntinuous reentrancy Rostami et al. [4-5 J studied the schedu1ab诅ty problem of ∞m住挝nts， a struct町al heuristic scheduling algorithm is cluster tools and considered residency time constraints. 伊四en伽d. A nonlin国r 严。gramming scheduling model is built τbey presented a linear progr缸nming-based method to on the basis of bounding the scheduling problem domain. A find an optimal periodic schedule wi由 a bu征er modu1e. feasible 归Ith search scheduling method of single-arm robotic However, the method only considered the scheduling O萨捆住.ons is put forward with the 0均ective of minimal problem of a single wafer product type. Yoon and Lee[6J mak臼pan. Fmally, simu1ation experiments 缸E 也signed to established a schedu1ing model with residency time con- analyze the scheduling algorithms. Resu1ts indicate 曲创出e straints and put forward a kind of online schedu1ing algo- proposed alg倒也m is feasible and valid to solve the scheduling rithm with different product types.τbe lit