- 1、本文档共7页,可阅读全部内容。
- 2、有哪些信誉好的足球投注网站(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
- 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载。
- 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
- 5、该文档为VIP文档,如果想要下载,成为VIP会员后,下载免费。
- 6、成为VIP后,下载本文档将扣除1次下载权益。下载后,不支持退款、换文档。如有疑问请联系我们。
- 7、成为VIP后,您将拥有八大权益,权益包括:VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
- 8、VIP文档为合作方或网友上传,每下载1次, 网站将根据用户上传文档的质量评分、类型等,对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档
查看更多
2002Update_Modeling
2002 Update Tables 143
THE INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS: 2002 UPDATE
MODELING AND SIMULATION
Table 102 Modeling and Simulation Difficult Challenges [Update]
Difficult Challenges ≥ 65 nm, Through
2007
Summary Of Issues
High-frequency Circuit Modeling
(5 GHz )
? Efficient simulation of full-chip interconnect delay
? Accurate 3D interconnect model; inductance, transmission line models
? High frequency circuit models including non-quasi-static, substrate noise and coupling
? Parameter extraction without RF measurements
Was Modeling of Ultra Shallow Dopant
Distributions, Junctions, and
Silicidation
? Dopant models and parameters (damage, high- concentration, activation, metastable effects, diffusion,
interface and silicide effects)
? Characterization tools for these ultra shallow geometries and dopant levels
Is Modeling of Ultra Shallow Dopant
Distributions (Junctions,
Activation), and Silicidation
? Dopant models and parameters (damage, high- concentration, activation, metastable effects,
diffusion, interface and silicide effects) in Si_based substrate, i.e. Si, SiGe:C (incl. strain),
SOI and ultra-thin body devices
? Characterization tools for these ultra shallow geometries and dopant levels
Was Modeling Deposition and Etch
Variations, Feature Variations across a
Wafer
? Fundamental physical data (e.g., rate constants, cross sections, surface chemistry); reduced models for
complex chemistry
? Linked equipment / feature models
? CMP ( full wafer and chip level, pattern dependent effects)
? Next generation equipment/wafer models
Is Modeling Deposition and Etch
Rate Variations, Feature Geometry
Variations across a Wafer
? Fundamental physical data (e.g., rate constants, cross sections, surface chemistry); reaction
mechanisms and reduced models for complex chemistry
? Linked equipment / feature scale models
? CMP ( full wafer and chip level, pattern dependent effects)
? MOCVD, PECVD and ALD modeling
?
您可能关注的文档
- (闽教版)四年级英语上册课件Christmas.ppt
- , Ton Weijters.pdf
- (用于检测记忆效果)考研英语大纲词汇排查表.pdf
- (中英文)煤流仪说明书coal flow monitor manual.pdf
- (廖静池 杜化宇 曾勇) 午盘休息是否会影响股票市场的价格发现功能.pdf
- - Progress.pdf
- (英文原版)2010年全球主题景点入场人数报告.pdf
- .net Framework各版本区别.ppt
- - Professional Standard.pdf
- -- An Interactive Constraint Based Nurse Scheduler.pdf
- 第17课 明朝的灭亡和清朝的建立 巩固练习 2024-2025学年下期初中历史统编版七年级下.docx
- 人教版(2019)必修三 Unit 1 Festivals and Celebrations Lis.pptx
- 人教版(2019)必修三 Unit 3 Diverse Cultures Reading for W.pptx
- 人教版(2019) 必修第一册 Unit 1 Teenage Life Reading and.pptx
- 人教版(2019)必修第一册Unit 2 Travelling Around Reading and.pptx
- 六年级单元作文复习.pptx
- 【作文写作法则】(初中语文)第10讲 常考应用文写作模板 学案.doc
- Unit 8 Once upon a Time 重点语法 专题练 2024-2025学.docx
- 人教版(2019)必修第一册Unit 3 Sports and fitness Reading fo.pptx
- 期末综合模拟试题 2024-2025学年下期初中道德与法治统编版八年级下册 (1).docx
文档评论(0)