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Development and performance of a magnetic ionic liquid for use in vacuum-compatible non-contact seals.pdf
Precision Engineering 47 (2017) 97–103
Contents lists available at ScienceDirect
Precision Engineering
journal homepage: /locate/precision
Development and performance of a magnetic ionic liquid for use in vacuum-compatible non-contact seals
Takao Okabe a,?, Daichi Moritaka b, Masaaki Miyatake a, Yukishige Kondo b, Shinya Sasaki a, Shigeka Yoshimoto a
a Department of Mechanical Engineering, Tokyo University of Science, 6-3-1 Niijuku Katsushika-ku, Tokyo 125-8585, Japan b Department of Industrial Chemistry, Tokyo University of Science, 1-3 Shinjyuku-ku Kagurazaka, Tokyo 162-8601, Japan, Japan
article info
Article history: Received 18 April 2016 Received in revised form 30 June 2016 Accepted 15 July 2016 Available online 4 August 2016
Keywords: Vacuum-compatible Magnetic liquid Magnetic ionic liquid Hydrostatic bearings Non-contact seal
abstract
For the electron-beam machining of optical media, a very low rotational speed is required to enable the precise fabrication of grooves of various depths and widths. In addition, a lubricant with a very low vapour pressure, such as an ionic liquid, and a vacuum chamber are needed to avoid contamination of workpieces. Accordingly, the development of a vacuum-compatible hydrostatic bearing using an ionic liquid is required to satisfy these rotational conditions and nanometre-order machining accuracy. To use a hydrostatic bearing in a vacuum environment, a non-contact vacuum seal is needed to avoid leakage of the ionic liquid used as the lubricant. Furthermore, making a non-contact seal using an ionic liquid requires the development of a new type of magnetic ionic liquid. Therefore, this paper describes the development of such a magnetic ionic liquid, which consists of magnetite (Fe3O4) particles, a newly synthesized dispersant, and a pyridinium-based ionic liquid. The outgassed products from this magnetic ionic liquid were measured when it was applied to a non-contact seal in a vacuum of about 10?6 Pa. In addition, its mechanical
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