CVD金刚石涂层拉丝模的研制与应用.pdf

年第 卷 2000 34 N 4 13 CVD 金刚石涂层拉丝模的研制与应用! 上海交通大学微电子技术研究所（ ） 张志明 沈荷生 孙方宏 何贤昶 万永中 200052 摘 要：以市售大孔径（ ）硬质合金拉丝模为衬底，经酸腐蚀去钴、研磨和还原处理后，以氢气和丙酮为 !2mm 原料，用穿孔直拉热丝CVD 法制备了金刚石涂层。利用扫描电镜和喇曼谱图对涂层均匀性进行了评估。初步应 用试验表明，金刚石涂层的附着力能满足实际拉伸要求，涂层拉丝模的工作寿命可提高3 5 倍。 关键词：金刚石涂层，拉丝模，热丝CVD Fabrication and Application of CVD Diamond-coated Drawing Die Zhang Zhiming !#$ ： （ ） Abstract Diamond-coated films are de osited b strai ht hot filament chemical va or de osition CVD assin throu h the p y g p p p g g a erture of drawin die usin a mixture of h dro en and acetone as source ases. the substrate is drawin die made b cemented p g g y g g g y carbides with lar e a erture diameter （ ）， ， g p !2mm and is retreated b various methods includin Co leachin in acid solution la - p y g g p in and decarbonisation . the homo enization and structure of films are characterized b scannin electron microsco and raman p g g y g py s ectrosco . the results of reliminar a lied tests show that the adhesion of diamond-coated film can meet the need of the p py p y pp practical drawing. the working lifetime of the drawing die with the diamond-coated film can increase 35 times. ： ， ， Ke words diamond-coated film drawing die hot filame