基于afm探针刻划可控三维微结构加工技术分析word格式论文.docx

哈尔滨工业大学工学博士学位论文 Abstract — —  PAGE 4 — III — 与 AFM 相应系统的对应关系，找到刻划加工过程中刻划深度的实时检测方 法，为刻划深度的闭环控制奠定基础； 应用微纳米塑性力学相关理论，对微悬臂探针压入材料样品形成压入深 度的过程进行分析，研究压入深度对应于压入驱动的形成规律，建立压入驱 动与压入深度之间的对象模型。并应用自动控制相应理论，设计优化相应的 控制器及控制算法，实现压入深度的闭环控制。应用有限元仿真手段，研究 微悬臂探针对样品刻划加工时刻划深度的变化规律，由此制定出刻划过程中 刻划深度的控制方案，最终实现刻划加工全过程的刻划深度闭环精确控制； 结合 AFM 及三维微动工作台，应用计算机及微处理器技术研制相应辅 助控制装置，组成刻划深度自动闭环控制的三维微结构加工检测一体化加工 系统。应用该加工系统，实现设定深度的三维微结构加工，并进一步研究三 维连续曲面及复杂曲面的三维微结构刻划加工。 关键词 微结构；原子力显微镜；机械刻划加工；刻划深度检测；刻划深度 控制 Abstract With the development of nanotechnology, the requirements for micro/nano system, micro/nano scale components and associated products have become more and more. Either the fabrication of MEMS (Micro Electro Mechanical Systems) components, or the manufacturing of micro/nano devices, the machining techniques in micro/nano scale are necessary for these fabrications. However, the conventional methods always are restricted by the control accuracy in some dimension during constructing the microstructure. As a result, only the two-dimensional or quasi-three-dimensional structures can be realized. Moreover, these fabrication methods all have no on-line or on-site measuring abilities. Thus, to construct an ideal method including fabrication and measuring to fabricate the three dimensional microstructure is significant urgent. The invention of scanned probe microscopy technology leads to the considerable progress of nanotechnologies. And now this technology is extensively used to modify the micro world, i.e. that the scanning tip is used as a tool to fabricate the micro structure under the control of the high accuracy AFM(Atomic Force Microscope) system. Moreover, due to the measuring capability for 3D topographies and no special limitations to work piece material and machining condition, this technology is therefore a perfect method to fabricate 3D microstructures. However, based on the commercial AFM system, the fabricated structures are always 2D. This is because there is no precision controlling in the