bst铁电薄膜移相器的设计与工艺分析word格式论文.docxVIP

优秀毕业论文 精品参考文献资料 Abstract The ferroelectric films based shifter for phase array antenna was a new phase shifter based on the ferroelectric thin film coplanar waveguide structure. It was one of the hotspots to military institutions and research organizations all over the world for its high reliability, anti-radiation, low drive power, small size and low cost. In this paper, the primary study was about the phase shifters’ theory, design and process, which focused on the basic theory and analysis method of coplanar waveguide phase shifter, the effect of interdigital on phase shifters, and the preparation process of ferroelectric thin film and so on. Based on the transmission line theoretical models and quasi-static field method, this experiment analyzed the parameter characteristics of coplanar waveguide structure respectively, simultaneously combining these two theories and the interdigital capacitor decomposition model, then came up with the simplified computational model for a lower frequency. This simplified theory can help to design the phase shifter with periodic interdigital structure and the approximate structure. HFSS software was used to simulate the coplanar waveguide structures with interdigital capacitor. The simulation results showed that more interdigital, the more increasing in the high frequency of insertion loss and return loss. While it will speed up the rate of periodical changes, so the phase angle can change rapidly, this was conducive to achieve a larger shift for phase shifter. Simulation results obtained different actual effective dielectric constant of interdigital structure model, and the calculation verified the simplified calculating theoretical model, which stated that there were a direct linear relationship between the interdigital capacitor structure and phase shifter phase angle variation. This experiment prepared the BST target and BST films separately by solid state reaction and RF magnetron sputtering. After analyzing the thin films