基于分子动力学的单晶硅纳米加工机理及影响因素研究-机械制造及其自动化专业论文.docx

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2018-05-05 发布于上海
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基于分子动力学的单晶硅纳米加工机理及影响因素研究-机械制造及其自动化专业论文.docx

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基于分子动力学的单晶硅纳米加工机理及影响因素研究-机械制造及其自动化专业论文

AbstractThedevelopmentofnanometricmachiningtechnologymakesitpossibleof manufacturingnano-electromachanicalsystemmanufacture. Whendimensionof themicrostructurereachesnanometerscales,nano-masnufacturingtheoryandmethodareessentiallydifferentfromtraditionalmechanicaldesignandmethodbecausemechanicalproperties,loadcharacteristicsandfailuremechanismwillchangeintrinsicallyinsuchdimensionalscale.Therefore,traditionalmechanicaldesigntheoryandmethodbasedonclassicalcontinuummechanicscannotbeapplieddirectlytonanometricmachininigtechnology,andnewresearchmethodshouldapplyideasfromlatestprogressesinmodernphysicstostudynano-manufacturingmechanismfromtheatomic-scalepointofview.Inthisthesis,moleculardynamics(MD)simulationisemployedtoinvestigatethedeformingmechanismofsinglecrystal siliconplanes duringnano-indentationandscratchingprocessandrelativeexperiments arecarriedout. Thenthe nano- cuttingmechanismofbrittlematerialsinglecrystalsiliconandresearchesof diamondtoolwearanditseffectoncuttingprocessarediscussed.Thefulfillmentofthisstudyhasresultedinabetterunderstandingofthenano-manufacturingmechanismofsinglecrystalsilicon,anditisofsignificancefor theoreticalinstructionofpracticaldesignandnano-manufacturingprocesses. Therefore,itwillcontributetothefundamentaltheoryofnano-manufacturing fortheirfurtherdevelopment.Firstly,thethreedimensionsimulationmodelsofnano-indentationandscratchingofsinglecrystalplanes(100),(110)and(111)aresetuptomakeresearchesonnano-deformingmechanismandmicromechanicalproperties.At thesametime,experimentsrelatedtosimulationmodelsarecarriedout.Theexperimentalresulatsshowthattheelasticmodulusvalueof(111)plane issmallerthanthatof(100)and(110)planes,andtherelationshipofelasticmodulusofthethreeclassicalplanesiscorrespondingtothatofsimulation.For thethreeplanes,therelationshipofincreasingslopesofscratchingloadsalongwithscratchingdepthsiscorrespondingtothatfromtheexperiments.ThephenomenamentionedaboveindirectlyprovethatMDiseffectivemethodtoresearchsiliconnano-machiningpro