精密运动平台的五自由度误差同时测量方法-中南大学学报.PDF

第 48 卷第 10 期 中南大学学报( 自然科学版) Vol.48 No.10 2017 年 10 月 Journal of Central South University (Science and Technology) Oct. 2017 DOI: 10.11817/j.issn.1672−7207.2017.10.010 精密运动平台的五自由度误差同时测量方法 王丽军，郑煜，吕文，李继攀，段吉安 ( 中南大学 机电工程学院，高性能复杂制造国家重点实验室，湖南 长沙，410083) 摘要：提出一种同时测量运动平台五自由度误差的方法。采用准直的激光光束作为基准，仅以角锥棱镜作为误差 测量的敏感器件，由 1 个斜方棱镜和聚焦透镜并辅以光电位移传感器组成测量系统。研究结果表明：直线运动平 台2 个直线度误差和 3 个角度误差可同时测量，且测量头无电缆连接；测量直线度误差的分辨率小于 0.1 μm ，角 度误差的分辨率小于 1″；直线度和角度测量精度分别达到 1 μm 和 5″。测量系统结构简单，易于安装和调节，适 用于运动平台多自由度误差精密测量。 关键词：同时测量；五自由度；运动误差；准直光束；运动平台 中图分类号：TN247 文献标志码：A 文章编号：1672−7207(2017)10−2628−07 Simultaneous measurement of five-degree-of-freedom motion errors of high-precision motion platforms WANG Lijun, ZHENG Yu, LÜ Wen, LI Jipan, DUAN Ji’an (State Key Laboratory of High Performance Complex Manufacturing, School of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China) Abstract: A quite simple and novel method for simultaneous measurement of five-degree-of-freedom motion errors was proposed. The collimated laser beam was used as the reference line, and only a cube corner prism was adopted in the moving platform as the sensitive element. The optical system was composed of a rhombic prism, a focus lens and three detectors. The results show that the horizontal and vertical straightness errors as well as pitch, yaw and roll angle errors can be measured simultaneously. At the same time, the measuring head is smart and wireless. The resolution of the straightness and angle errors can reach 0.1 μm, 1″, respectively, and the m