有哪些信誉好的足球投注网站temperature frequency characteristics of hexamethyldisiloxane (hmdso) polymer coated rayleigh surface acoustic wave (saw) resonators for gas-phase sensor applications温度频率特性hexamethyldisiloxane(hmdso)聚合物涂层瑞利声表面波谐振器(看到)气相传感器应用.pdfVIP
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temperature frequency characteristics of hexamethyldisiloxane (hmdso) polymer coated rayleigh surface acoustic wave (saw) resonators for gas-phase sensor applications温度频率特性hexamethyldisiloxane(hmdso)聚合物涂层瑞利声表面波谐振器(看到)气相传感器应用
Micromachines 2012, 3, 413-426; doi:10.3390/mi3020413 OPEN ACCESS micromachines ISSN 2072-666X /journal/micromachines Article Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications Karekin D. Esmeryan, Ivan D. Avramov * and Ekaterina I. Radeva Georgi Nadjakov Institute of Solid State Physics, 72, Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria; E-Mails: karekin_esmerian@abv.bg (K.D.E.); eradeva@issp.bas.bg (E.I.R.) * Author to whom correspondence should be addressed; E-Mail: iavramov@issp.bas.bg. Received: 29 March 2012; in revised form: 18 April 2012 / Accepted: 27 April 2012 / Published: 2 May 2012 Abstract: Temperature induced frequency shifts may compromise the sensor response of polymer coated acoustic wave gas-phase sensors operating in environments of variable temperature. To correct the sensor data with the temperature response of the sensor the latter must be known. This study presents and discusses temperature frequency characteristics (TFCs) of solid hexamethyldisiloxane (HMDSO) polymer coated sensor resonators using the Rayleigh surface acoustic wave (RSAW) mode on ST-cut quartz. Using a RF-plasma polymerization process, RSAW sensor resonators optimized for maximum gas sensitivity have been coated with chemosensitive HMDSO films at 4 different thicknesses: 50, 100, 150 and 250 nm. Their TFCs have b
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