一种电极型MEMS电场传感器封装结构Electrode-长江科学院院报.PDF

第38 卷第11 期 电 子 与 信 息 学 报 Vol.38No.11 2016 年11 月 Journal of Electronics Information Technology . Nov. 2016 一种电极型MEMS 电场传感器封装结构 闻小龙*① 任天令① 夏善红② ①(清华大学微电子学研究所 北京 100084) ②(中国科学院电子学研究所传感技术联合国家重点实验室 北京 100190) 摘 要：为了提高MEMS 电场传感器敏感芯片封装的环境适应性，该文提出一种新型的电极型MEMS 电场传感 器封装结构。区别于将传感器敏感芯片及探头放置于被测环境中，该文通过在MEMS 电场传感器封装管壳外部增 加封装电极，仅将封装电极暴露在被测环境中，有效避免了传感器敏感芯片封装管壳受到多种恶劣环境的干扰。研 制出基于新型封装结构的MEMS 地面电场传感器及探空电场传感器，仿真及试验结果表明，该结构传感器能够实 现对电场高精度准确测量，在高湿、低温等恶劣环境下输出稳定可靠。 关键词：电场传感器；微机械电子系统；封装；环境适应性；大气电场探测 中图分类号： TP212 文献标识码： A 文章编号：1009-5896(2016)11-2960-05 DOI: 10.11999/JEIT160608 Electrode Package for Electric Field Micro Sensor ① ① ② WEN Xiaolong REN Tianling XIA Shanhong ① (Institute of Microelectronics, Tsinghua University, Beijing 100084, China) ② (State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China) Abstract: To improve the environmental adaptation of the package of electric field micro sensor, this article introducs a new electrode package. Different from placing the sensing chip and package inside the measured environment, a package electrode, which is the only part exposed outside, is invented. In this way, the package shell is effectively protected from various environmental extremes. Based on this structure, new atmospheric electric field micro sensors are introduced on the ground and for sounding. The FEM and experiments show that the new sensors measure electric field accu