直线超声电机驱动精密二维定位平台系统.pdfVIP

第34 卷 第18 期 中 国 电 机 工 程 学 报 Vol.34 No.18 Jun. 25, 2014 2960 2014 年6 月25 日 Proceedings of the CSEE ©2014 Chin.Soc.for Elec.Eng. 10.13334/j.0258-8013.pcsee.2014.18.012 0258-8013 (2014) 18-2960-07 TM 359.4 TP 273 DOI ： 文章编号： 中图分类号： ； 直线超声电机驱动精密二维定位平台系统 张军，时运来，梁大志，赵淳生 (机械结构力学及控制国家重点实验室(南京航空航天大学) ，江苏省 南京市 210016) A 2-D Precision Positioning Table System Driven by Linear Ultrasonic Motors ZHANG Jun, SHI Yunlai, LIANG Dazhi, ZHAO Chunsheng (State Key Laboratory of Mechanics and Control of Mechanical Structures (Nanjing University of Aeronautics and Astronautics), Nanjing 210016, Jiangsu Province, China) ABSTRACT: A kind of two-dimensional (2-D) high precision 的定位精度。 positioning table system driven by butterfly-shaped linear 关键词：直线超声电机；压电；精密定位；复合控制 ultrasonic motors was designed for requirements of precision positioning system in the precision actuator technology field. 0 引言 The range of the precision positioning system is 50 mm by 50 mm, the linear incremental grating encoders were used as 随着半导体光刻技术、微型机械、精密测量、 feedback components, and the motion control card was used 超精密加工、微装配和纳米技术的迅速发展，对精 for system control by control algorithm. A novel ultrasonic 密定位系统的行程、速度和精度等提出了越来越高 motor driver, which the output voltage and the frequency can 的要求，其控制精度在微米级，甚至纳米级的范围 be controlled independently, was designed to drive linear [1-2] 内 。精密运动系统是集精密位置检测技术、驱动 ultrasonic motor. The compound control and the advantages of high resolution