压电加速度测量系统的设计.PDF

31 2 2009 4 PI EZO EL ECT ECT RI CS ACO U ST OO PT ICS : 1004 2474( 2009) 02 0215 03 Vo l. 31 No . 2 Apr . 2009 邢丽娟, 杨世忠 ( , 266520) :, ,, ;, , , ,, : ;; : T P212 :A Design for Piezoelectric Accelerometer Measurement System XING Li juan, YANG Shi zhong ( College of A ut omati on En gi neering, Q ingdao T echnological U niversit y, Q ingdao 266520, Chin a) Abstract: In modern industry and automatic pro ductio n, the accurate measurement of the v ibration and str ike in test ing dynamically seems especially import ant. Fo r the acquisit ion of signal, the mo st co mmon used sensor is piezoe lect ric accelero meter. On the basis o f researching piezo electric acceler ometer senso r, this paper analyzed the w o rk pr inciple o f measurement, pro po sed a kind o f acceler ometer measur ement desig n method. A dding temperature sensor to com pensat e t emperat ur e, the applied temperature rang could be w ider . Detectio n cir cuit suiting this kind of sensor and the sy stem co mpo sitio n o f acceler ometer measurement was also g iv en in the paper. T his desig n metho d w as ac curate w ith hig h v alue for application and ext ensio n. A lso the st ruct ur e w as simple, the pr ice was lo wer and the per fo rmance w as stable. Key words: piezoelect ric accelero meter senso r; measurement; design , , , , , , ; ; , , , , 1 , [ 1] , ,, ,, , , () , 1 测量原理 , , : 2007 10 17 : ( 1973 ) , , , ,,, 1 216 2009 ( , , ) , ) [ 2] , , F, F, F = Ma F = ( M+ m) a M ;m () , , , (z , ( 1) ( 2) ;a A ;0 , ;r ,, , ( 1) ( 2) : , , Ra , 2 Ri Ci Cc ( 1) ( 2) (z ) F= M a+ ma( 1- z / d) d F= 1 d d 0 Ma + ma 1- z d dz = M+ 1 2 m a , ), z , , T 3= 1 A ( M+ 1 2 m) a A D, Q= d33 T 3 A = d33 ( M+ 1 2 m) a d 33 ,, m, ( 6) Q= d33 M a ( 7) , Q d 33 M ( 3) ( 4) (z T 3, ( 5) ( 6) M ( 7) , 2 测量电路 , , , , Ca= r 0A d , ( 8) 2 ,AK R i , Ra = 109 ~ 10l4 Ra Uo , , Ri Ui , Q= U i( Ca + Cc + Ci ) + ( U i- Uo ) CF ( 9) CF Uo = - A K Ui ( 9) Uo= ( Ca+ Cc+ A KQ Ci) + ( 1+ A )CF ( 10) , ( 1+ AK ) CF Ca + Cc+ Ci , ( 1