用于红外单光子探测的APD二次封装技术.pdfVIP

SEMICOND UCTOR OPTOEL ECTRONICS 　Vol . 27 No. 4 Aug. 2006 光电器件 用于红外单光子探测的 APD 二次封装技术 李日豪 , 廖常俊 , 王金东 , 郭健平 , 刘颂豪 ( 华南师范大学 信息光电子科技学院,广东 广州 510631) 摘 　要 : 　介绍了用于红外光探测的 A PD 二次封装的概念和技术 ,将绝热和致冷分开考虑和 设计 ,在常温常压下进行填充式清洁干燥气密封装 ,保持真空密封的优点 ,消除潮气的影响 ,致冷效 率高 。封装后的外形小巧 ,结构简单规范 ,与电控及信号处理系统适配 ,性能测试结果良好 。 关键词 : 　单光子探测 ; 二次封装 ; 半导体珀尔帖致冷 中图分类号 : TB66 　文献标识码 : A 　文章编号 : 100 1 - 5868 (2006) 04 - 0376 - 03 APD Postpackaging Technology f or Singlephoton Detection in Inf rared Region L I Rihao , L IA O Changj un , WAN G J indong , GU O J ianp in g , L IU Songhao ( School f or Inf ormation and Optoelectronic Science and Engineering , South China Normal University , Guangzhou 510631 , CHN) Abstract : 　The concep t and t echnolo gy of p o stp ackaging are int ro duced to imp rove t he cooling efficiency in avalanche p hoto dio de (A PD) t her mally cont rolled for sin glep hoton det ectio n in inf rared region . The t her mal in sulatin g ,ab st racting and t he air her metic sealing are con sidered sep arat ely in de signin g . The clean ,dry and her metic p ackaging i s realized at nor mal t emp erat ure and p re ssure . The device can keep up t he merit of vacuum encap sulation ,eliminat e t he humidit y influence ,and ha s high efficiency . In addition , t he device i s charact erized by small figure , simp le configuration , mat chin g wit h t he elect ricit y cont rol an d signal p roce ss sy st em , and goo d p erfor mance s. Key words : 　singlep hoton det ection ; po stp ackagin g ; semiconductor Peltiercooled 1 　引言 暗计数是导致误码率的主要因素[3 ,4 ] 。在单光子探 测器中