微米级电化学加工关键技术研究.pdfVIP

张朝阳 朱荻 曲宁松 王明环 南京航空航天大学, 南京, 210016 : 针对微米级电化学加工的关键技 问题, 研制了用于微米级电化学加工的纳秒脉冲电源, 并 利用电化学腐蚀方法, 在自制的电化学加工机床上连续实现了微细工具电极的制作和工件的加工基 于试验提出了微细电化学加工间隙的检测控制方法, 提高了加工过程的稳定性, 增强了定域蚀除能力 在低浓度酸性电解液中实现了微米级的电化学加工, 利用研制的纳秒脉冲电源, 根据加工电流将极间间 隙控制在5m 左右, 加工出了NUAA字形, 每 个字母高90m, 宽60m, 字母线条的宽度只有20m : ; ; ; : T G662 : 1004 132X( 2007) 040403 04 Investigation on Key Techniques of Electrochemical Micro- machining Zhang Zhaoyang Zhu Di Q u Ningsong W ang Minghuan Nanjing U niversity of Aeronautics an Astronautics, Nanjing, 210016 Abstract: T he key techniques an realization approach of electrochemical micro - machining ( EMM) w ere stu ie . U ltra- short pulse pow er source for the requirements of EMM w as esigne an fabricate . On the self- evelope equipment, tool electro e an w orkpiece w ere sequentially ma- chine w ith electrochemical metho . The real- time monitoring an control of the electrochemical ma- chining gap w ere presente in or er to improve the localization an the stability of machining process. So micrometer precision of ECM is achieve in the low concentration aci electrolyte. Inter- electro e gap is controlle to about 5m on the basis of the machining current. Four letters of NUAA are ma e by the nanosecon pulse pow er source. T he size of each letter is 60m in w i th, 90m in height, the lines of letters are 20m in w i th. Key words: electrochemical micro- machining; ultra- short pulse pow er source; tool electro e; in- ter- electro e gap 0 引言 , [ 1] : 200601 10 , : ( 04H 52055) ; [