电容式力平衡加速度计的设计.pdfVIP

第19 卷 第2 期 传 感 技 术 学 报 V ol. 19 No. 2 2006 年4 月 CHINESE JOURNAL OF SENSORS AND ACT UATORS Apr. 2006 Design of Force-Balance Capacitive Accelerometer CH EN Yu, Y U F a-x in , WA N G H ui-quan, J I N Zhong-he, WA N G Yue-l in ( D ep t. o i n or ma tion science el ect ronic eng i neeri ng , Zhej iang Univ er s i ty , H ang z h ou 3 10027, Ch ina) Abstract:M icro- mech anical cap acitiv e accelero meter is one kind of hig h sen sit ive inert ial sensors w hich con- v ert t he accelerat ion t o dif ferent ial capacit ance and the acceleration valu e can be obtained by det ect ing the variat ion o f the m icro def ferent ial cap acit ance U sing t he sw it ching capacit y circuit t o realiz e the C- V con- v ert and u sing the feedb ack of t he elect rostat ic f orce to realize f orce- balance clo sed- loop co nt ro l, t he m icro- mech anical capacit ive accelero meter is desig ned T he mat hem at ic model of t he cap acit ive acceleromet er and its p er ipher al int erf ace cir cu it is set up On this b asis, t he t ransfer funct io n o f t he clo sed- loop op er at ion syst em is derived A nd t he m easurement result s on t he sy st em is show n to o Key words: micro- m echanical cap acit iv e acceler omet er; fo rce- b alance closed- loop cont rol; diff erent ial capac- it ance; C- V convert EEACC:732 E * 陈 渝, 郁发新 , 王慧泉, 金仲和, 王跃林 ( , 310027) : C- V , , , , : ; ; ; C- V :TP212. 12; TP8 2 :A :1 4-1699( 2 6) 2- 411- 4 , , , , , , , , , , , , , ; , , ,