谐振式大量程智能气体传感器.pdfVIP

第 卷 第 期 纳 米 技 术 与 精 密 工 程 11 2 Vol. 11 No.2 年 月 2013 3 Nanotechnology and Precision Engineering Mar. 2013 A Smart Wide Range Resonance Gas Sensor with a Multi-Mode Single-Port Micro-Cantilever 1 1 1 2 1 Zhao Jiahao ， Li Peng ， Guan Liu ， Li Xiangyu ， You Zheng （1. State Key Laboratory of Precision Measurement Technology and Instruments （Tsinghua University ）， Beijing 100084 ， China ； 2. Department of Electronic Engineering ， Tsinghua University ， Beijing 100084 ， China ） Abstract ： A cantilever based resonance gas sensor monitors the resonant frequency shift of the can- tilever in order to detect certain gas molecules. This paper presents a smart resonance gas sensor ， in which a multi-mode single-port micro-cantilever is driven by a self-actuating and detecting （SAD ） cir- cuit loop. The motivation of the SAD loop simplifies the structure and micro-machining process of the cantilever. Furthermore ， it has a smart function to make the resonating cantilever transfer its resonance mode conveniently for a wide detection range. The model and the sensitivity distribution of the micro- cantilever device in different resonance modes are analyzed. The gas response features of the proposed gas sensor ， in which the single-port cantilever operated in multi-mode ， are also investigated to demonstrate the design of the multi-mode SAD system and smart function of mode switch for wide detection range.