icpms碰撞反应池的研究及离子透镜的设计与实现-research on icp ms collision reaction cell and design and implementation of ion lens.docx

ABSTRACTInductively coupled plasma mass spectrometry (ICP-MS) not only is widely used in trace and ultra-trace analysis of elements，but also plays an important role in theanalysis of isotope ratios and morphology. This paper focuses on studying some key components in ICP-MS which called collision and reaction cells and ion lens system.In order to solve the problem of interference from polyatomic ions during the process of measurement with ICP-MS, we study the technology of collision cells and reaction cells. We study the mechanism of interference from polyatomic ions and analyze the main factors affecting the efficiency of the collision cells and reaction cells, and make some summaries later. Based on the theory of multi-quadrupole, we study on the characteristics of ion motion under high vacuum and low vacuum with Simion8.1, and finally we establish evaluation criteria to compare and evaluate performances of quadrupole, hexapole, octopole collision cells and reaction cells. Meanwhile, our simulation verifies the focusing effects of the collision and the kinetic effects of discrimination, and the effects of axial voltage and the gas flow on the efficiency of collision cells and reaction cells are studied.In order to reduce noise from background and improve the sensitivity of ICP-MS, we design and manufacture a 90-degree ion deflection system which is convenient for cleaning and maintenance. We study the theory of electric quadrupole and analyze the feasibility of the 90-degree deflection lens’ structure. Finally, through studying the theory that the electrostatic field in the quadrupole has impact on the ions motion we design and manufacture the lens system, including the lens housing based on the quadrupole structure, the extraction lens in front of the lens housing and the exit lens after the lens housing. We pre-select the voltage values for our developed parts through simulating the transmission processes of ions with Simion8.1, and then we optimize the voltage