icpms的离子运动研究与仪器实现-ion movement research and instrument implementation of icp ms.docx

摘 要近年来，新材料、新能源行业迅猛发展，环境生态、食品安全问题日益凸显， ICP-MS（电感耦合等离子体质谱仪）作为具有广泛适用性的痕量超痕量分析工 具，涉足领域愈来愈广，体现出巨大的发展潜力。拥有国人自主研发的高水平电 感耦合等离子体质谱仪器已经成为广大分析工作者的强烈愿望和迫切需求。本文以“ICP-MS 仪器的研制”项目为依托，从研究离子整个运动过程的角 度来实现仪器工作参数的优化、新型部件的设计。本文在对等离子体气流运动和 离子提取过程的研究中，首次建立了正离子提取模型，评价了锥后空间电荷效应 的影响，解释了 ICP-MS 分析中常见的轻质量歧视现象；利用电磁场分析软件 SIMION 模拟了离子在现有透镜系统中的运动轨迹，以优化电极电压组合提高离 子传输效率，提出了基于四极静电偏转以及扫描驱动的新型离子传输系统的设计 方案；分析了离子在四极射频场中运动过程，通过计算机模拟获得四极质谱图， 探讨了与四极滤质器分辨率、扫描质量范围、丰度灵敏度等参数相关的因素，提 出了四极质量分析系统的整体设计方案，包括结构及扫描系统的设计。目前第一代样机已经研制完成，并具备基本的无机元素、同位素检测能力， 本文中就其已具有的分析能力及部分性能参数做出了评估，对现阶段仍存在的问 题提出了实验解决方案。关键词： 电感耦合等离子体 质谱仪 离子运动 仪器实现ABSTRACTIn the recent years, fields of material and energy has been booming, also problems in environment and food safety has been prominent, ICP-MS, as a detection apparatus, has been widely applied in various fields, showing extreme potent in ultra-trace detection. It is a strong desire and urgent needs for the analysis operator that our nation should possess the inductively coupled plasma mass spectrometry analysis device, which is researched and developed by ourselves.This paper is based on and supported by the project ICP-MS instrument development, and takes research from the whole ion-movement perspective to achieve the optimization of the instrument operating parameters and the design of new components. From studying the process of the flow movement of the plasma and ion extraction, this paper initially established a positive ion extraction model, evaluated the space charge effect after cone, explained the light quality discrimination, which is a common phenomenon in ICP-MS analysis, simulated the trajectory of ion in the current lens system by using an electromagnetic fields analysis software SIMION in order to optimize the electrode voltage combination and increase the ion transmission efficiency, proposed a new design of ion transport systems based on electrostatic deflection and the quadrupole scan-driven, analyzed the ion’s movement in the four radiofrequency field, obtained quadrupole