A flexure-based mechanism and control methodology for ultra-precision turning operation精品.pdfVIP

Precision Engineering 33 (2009) 160–166 Contents lists available at ScienceDirect Precision Engineering j o u rn al h omepage: w w w. elsev /locate/precision A flexure-based mechanism and control methodology for ultra-precision turning operation Y. Tian a,b,∗ , B. Shirinzadeh a , D. Zhang b a Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton, VIC 3800, Australia b School of Mechanical Engineering, Tianjin University, Tianjin 300072, China a r t i c l e i n f o a b s t r a c t Article history: This paper presents the methodology for modeling and control of a high precision flexure-based mech- Received 8 January 2008 anism for ultra-precision turning operation. A high performance piezoelectric actuator is used to driven Received in revised form 22 April 2008 the flexure-based mechanism. A parallel flexure hinge mechanism is utilized to guide the moving plat- Accepted 9 May 2008 form and to preload the piezoelectric actuator. A high resolution capacitive sensor is used to measure the Available online 3 June 2008 displacement of the flexure-based mechanism for closed-loop control. With consideration of the driving circuit, the dynamic model of the flexure-based mechanism has been established. The effect of the driving Keywords: circuit on the dynamic response of the precision mechanism is investigated. Experimental tests have been Flexure-based mechanism Piezoelectric actuator