Semiconductor Device and Material Characterization：半导体设备和材料特性精品.pdfVIP

ECE 4813 Semiconductor Device and Material Characterization Dr. Alan Doolittle School of Electrical and Computer Engineering Georgia Institute of Technology As with all of these lecture slides, I am indebted to Dr. Dieter Schroder from Arizona State University for his generous contributions and freely given resources. Most of (80%) the figures/slides in this lecture came from Dieter. Some of these figures are copyrighted and can be found within the class text, Semiconductor Device and Materials Characterization. Every serious microelectronics student should have a copy of this book! ECE 4813 Dr. Alan Doolittle Welcome  Welcome to ECE4813 Semiconductor Device and Material Characterization. This is a most useful course if  You are working with semiconductor materials or devices  You are involved with measurements  You are looking for a job (answer interview questions)  It will give you a good overview of most of the characterization techniques in the semiconductor industry  Electrical measurements  Optical measurements  Electron and ion beam measurements  X-ray and probe measurements  The prerequisite for this course is a previous course in semiconductor device physics, e.g., ECE3040, 3080, or 4751  You should be familiar with the basic semiconductor devices: pn junctions, metal-semiconductor devices, and MOS devices ECE 4813 Dr. Alan Doolittle Learning Objectives  The objective of this course is an understanding of most of the characterization techniques used in the semiconductor industry 