MEMSic设计流程.pdf

DAC.COM KNOWLEDGE CENTER ARTICLE Bringing MEMS Into the IC Design Flow Stephen Breit1 and Randolph Fish2 1 Coventor, Inc., Cary, NC USA 2 Cadence Design Systems, Inc., San Jose, CA USA Notice of Copyright This material is protected under the copyright laws of the U.S. and other countries and any uses not in conformity with the copyright laws are prohibited. Copyright for this document is held by the creator — authors and sponsoring organizations — of the material, all rights reserved. This document has been submitted to, and reviewed and posted by, the editors of DAC.com. Please recycle if printed. DAC.COM KNOWLEDGE CENTER ARTICLE Page 2 of 9 WHITE PAPER: MEMS and IC Design Bringing MEMS Into the IC Design Flow Stephen Breit1 and Randolph Fish2 1 Coventor, Inc., Cary, NC USA 2 Cadence Design Systems, Inc., San Jose, CA USA Abstract— Micro-electromechanical systems have been available for years, and have been successful in selected high-volume applications. But MEMS design is not as widespread as it could be. MEMS design typically requires teams of expert specialists, and is mostly confined to IDMs that have their own fabs. Traditionally, there is little connection between the design of a MEMS device and the electronic circuitry it interacts with, and the handoff between MEMS and IC designers is ad hoc, manual and error-prone. This article describes the traditional MEMS design flow, discusses requirements for a “structured” and automated design flow, and shows an example flow that links a co