管道材料介绍.ppt

UHP Gas Delivery System Materials Agenda Part 1 Tubing / Piping Fitting Part 2 Valve Regulator Part 3 Filter Gauge Other Tubing / Piping Polymer - nylon, plastics, PFA/PVDF Permeability and outgassing characteristics Metals Copper, SS304, SS316, SS316L VIM/VAR, Hastelloy Tubing / Piping－Metal Tubing / Piping－Metal Tubing / Piping - Treatment 2 types: 1. Polish: Chemical Polish (Acid) Mechanically Polish (MP) Electro Polish (EP) 2. Passivation: Fluorine Passivation (5% F2/N2) Tubing / Piping Ra= Roughness Absolute Maximum Average Minimum Conversion 1μm ≈ 40μin 1meter = 3.28 ft Process AP BA EP Tubing / Piping - Process Cold Drawing Process Tubing / Piping Supplier Manufacturer VALEX Dockweiler WinTech KUZE Sandwec Cardinial Country U.S.A Germany U.S.A Japan U.S.A U.S.A Tubing / Piping Valex Tubing / Piping Dockweiler Product Ultron LM EP VIM/VAR Ra 8μin Ultron EP SS316L Ra 8/10/14μin Finetron ?? SS316L Ra 16/24μin TCC BA SS316L Aimed at 40μin Twin Wall Tube ?? SS316L ?? VSR80 ?? SS316L ?? Safetron EP/BA SS316L Ra10μin/16μin Weldtron EP/BA SS316L Ra10μin/32μin Tubing / Piping KUZE Clean Pipe For Semiconductor/Liquid Crystal Plants A Size Except ?”~1” AP Ra 100μin (OD≤355.6mm) BA Ra 15μin (6.35mm~≤48.6mm) Ra 20μin (48.6mm~≤139.8mm) EP Ra 10μin (6.35mm≤OD≤350A) For Biochemical/Pharmaceutical/Food Processing Plants Fitting Classification Tube Fitting / Compression Fitting（Let-lok） Face Seal （VCR / VCO） Weld Fitting Pipe Fitting （NPT） Quick Connect Coupling Hose Connector Compression Fitting SWG Compression Fitting Supplier Manufacturer Country Agent Swagelok U.S.A Swagelok Ham-let Israel Gen/W.S Parker U.S.A L.M/P.Hanninfin TK Korea L.M Hylok Korea L.M JPE Korea Compression Fitting Let-lok Compression Fitting Let-lok Part Number Comparison Table Face Seal VCR Face Seal Su