晶圆重入加工的组合设备终止暂态的调度与分析-控制理论与应用.pdfVIP

32 5 Vol. 32 No. 5 2015 5 Control Theory Applications May 2015 DOI: 10.7641/CTA.2015.40780 , (, 341000) : , . , Petri 1- , , , . eM-Plant, 1-, . : ; ; ; Petri; ; ; : TP278; TP391.9 : A Scheduling and analysis of final transient process for cluster tools with wafer revisiting PAN Chun-rong , LI Liang (School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou Jiangxi 341000, China) Abstract: For some semiconductor fabrication processes in cluster tools, wafer revisiting is a typical and complicate process. Analysis and optimization of the transient process is of great significance for wafer processing. Based on the Petri net and 1-wafer cyclic schedule, in order to meet processing requirements and improve processing performance of cluster tools, the final transient process for dual-arm cluster tools with wafer revisiting is analyzed by using virtual wafer processing mode. Then, the processing time of final transient process in different conditions is described by some expressions. For final transient process with wafer revisiting to be analyzed more intuitively, a simulation model is developed by using eM- Plant as a simulation platform. With this model, illustrative examples are given to show the feasibility of 1-wafer cyclic schedule and effectiveness of the expressions. Thus, the simulation model provides an effective tool for researchers to study the optimization of wafer fabrication with revisiting. Key words: wafer fabrication; cluster tools; revisiting; Petri net; modeling; scheduling; simula