temperature effects on the propagation characteristics of love waves along multi-guide layers of sio2su-8 on st-90°x quartz温度对爱波的传播特性的影响以及multi-guide层sio2su-8 st - 90°x石英.pdfVIP

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temperature effects on the propagation characteristics of love waves along multi-guide layers of sio2su-8 on st-90°x quartz温度对爱波的传播特性的影响以及multi-guide层sio2su-8 st - 90°x石英.pdf

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temperature effects on the propagation characteristics of love waves along multi-guide layers of sio2su-8 on st-90°x quartz温度对爱波的传播特性的影响以及multi-guide层sio2su-8 st - 90°x石英

Sensors 2012, 12, 7337-7349; doi:10.3390/s120607337 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio /Su-8 on 2 St-90°X Quartz Fangqian Xu 1, Wen Wang 2,*, Jiaoli Hou 2 and Minghua Liu 2 1 Zhejiang University of Media and Communications, Hangzhou 310018, China; E-Mail: xufangqian2005@163.com 2 Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China; E-Mails: hou720@ (J.H.); liuminghua@ (M.L.) * Author to whom correspondence should be addressed; E-Mail: wangwenwq@; Tel.: +86-10-8254-7803; Fax: +86-10-8254-7802. Received: 6 April 2012; in revised form: 21 May 2012 / Accepted: 22 May 2012 / Published: 30 May 2012 Abstract: Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm. 2 Keywords: Love wave; multi-guide; SU-8; SiO2 ; ST-90°X quartz; Tcf 1. Introduction Recently, the