sputtered encapsulation as wafer level packaging for isolatable mems devices a technique demonstrated on a capacitive accelerometer气急败坏的封装为可隔离的mems器件晶圆级包装技术演示了电容式加速度计.pdfVIP

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sputtered encapsulation as wafer level packaging for isolatable mems devices a technique demonstrated on a capacitive accelerometer气急败坏的封装为可隔离的mems器件晶圆级包装技术演示了电容式加速度计.pdf

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sputtered encapsulation as wafer level packaging for isolatable mems devices a technique demonstrated on a capacitive accelerometer气急败坏的封装为可隔离的mems器件晶圆级包装技术演示了电容式加速度计

Sensors 2008, 8, 7438-7452; DOI: 10.3390/s8117438 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Sputtered Encapsulation as Wafer Level Packaging for Isolatable MEMS Devices: A Technique Demonstrated on a Capacitive Accelerometer Azrul Azlan Hamzah 1,*, Jumril Yunas 1, Burhanuddin Yeop Majlis 1 and Ibrahim Ahmad 2 1 Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, Malaysia; E-mail: azlanhamzah@ukm.my; burhan@vlsi.eng.ukm.my 2 Department of Electrical, Electronics, and Systems Engineering, Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, Malaysia; E-mail: ibrahim@vlsi.eng.ukm.my * Author to whom correspondence should be addressed; azlanhamzah@ukm.my Received: 11 October 2008; in revised form: 11 November 2008 / Accepted: 14 November 2008 / Published: 19 November 2008 Abstract: This paper discusses sputtered silicon encapsulation as a wafer level packaging approach for isolatable MEMS devices. Devices such as accelerometers, RF switches, inductors, and filters that do not require interaction with the surroundings to function, could thus be fully encapsulated at the wafer level after fabrication. A MEMSTech 50g capacitive accelerometer was used to demonstrate a sputtered encapsulation technique. Encapsulation with a very uniform surface profile was achieved using spin-on glass (SOG) as a sacrificial layer, SU-8 as base layer, RF sputtered silicon as main structural layer, eutectic gold-silicon as seal layer, and liquid crystal polymer (