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Simple ThermalEfficiency Model for CMOS (简单的CMOS ThermalEfficiency模型)
Volume 111, Number 3, May-June 2006
Journal of Research of the National Institute of Standards and Technology
[J. Res. Natl. Inst. Stand. Technol. 111, 243-253 (2006)]
Simple Thermal-Efficiency Model for
CMOS-Microhotplate Design
Volume 111 Number 3 May-June 2006
Jon Geist, M. Yaqub Afridi, Simple, semi-empirical, first-order, analyt- Key words: CMOS; low-voltage; MEMS;
Ankush Varma, and Allen R. ic approximations to the current, voltage, microhotplate; model; sub-micron.
and power as a function of microhotplate
Hefner
temperature are derived. To lowest order,
the voltage is independent of, and the
National Institute of Standards Accepted: March 16, 2006
power and current are inversely propor-
and Technology, tional to, the length of the microhotplate
Gaithersburg, MD 20899 heater legs. A first-order design strategy
based on this result is described. Available online: /jres
jon.geist@
afridi@
allen.hefner@
1. Introduction with practical power levels and without significant
heating of the die on which it is located.
A Complementary Metal-Oxide Se
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