直拉硅单晶生长过程建模与控制研究综述-控制理论与应用.pdfVIP

第34 卷第1 期 控制 理 论 与 应 用 Vol. 34 No. 1 2017 年1 月 Control Theory Applications Jan. 2017 DOI: 10.7641/CTA.2017.60247 直直直拉拉拉硅硅硅单单单晶晶晶生生生长长长过过过程程程建建建模模模与与与控控控制制制研研研究究究综综综述述述 刘 丁 , 赵小国, 赵 跃 (西安理工大学晶体生长设备及系统集成国家地方联合工程研究中心, 陕西西安710048) 摘要: 硅单晶是最重要的半导体材料, 90%的半导体器件和集成电路芯片都制作在硅单晶上. 随着集成电路技术 的快速发展, 对硅单晶的品质要求也不断提高. 直拉法是生产硅单晶的主要方法, 其科学原理与方法、生长技术与 工艺、控制策略与手段一直是理论界和产业界高度关注和不断研究的热点. 本文针对直拉法电子级硅单晶生长过 程, 以晶体生长基本原理为基础, 从生长建模、变量检测、控制方法等方面进行了全面的阐述, 特别针对当今大尺 寸、高品质硅单晶生长的要求, 总结了目前所取得的主要研究成果与面临的问题, 并提出了相应的研究思路和方法. 关键词: 直拉硅单晶; 过程建模; 变量检测; 过程控制; 控制策略 中图分类号: TP273 文献标识码: A A review of growth process modeling and control of Czochralski silicon single crystal LIU Ding , ZHAO Xiao-guo, ZHAO Yue (National Local Joint Engineering Research Center of Crystal Growth Equipment and System Integration, Xi’an University of Technology, Xi’an Shaanxi 710048, China) Abstract: Silicon single crystal is one of the most important materials of semiconductor. More than 90% of semi- conductor devices and integrated circuit chips are made of silicon single crystal. As the rapid development of integrated circuit technique, the quality of silicon single crystal is being concerned much more than before. Czochralski method is the main method of silicon single crystal production, therefore, its scientific principle and method, growth technique and technology, as well as control strategy and method have always been a hot research topic in both academia and industry. Fo