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等离子体浓度对离子撞击材料表面能量通量的影响 effect of plasma density on ion energy flux colliding on the material surface
2006 年 7 月 电 工 技 术 学 报 Vol.21 No.7 第21 卷第7 期 TRANSACTIONS OF CHINA ELECTROTECHNICAL SOCIETY Jul. 2006 等离子体浓度对离子撞击材料表面 能量通量的影响 710049 摘要 关键词 中图分类号 TM405 Effect of Plasma Density on Ion Energy Flux Colliding on the Material Surface Li Zhigang Ding Yucheng Xian Jiaotong University Xian 710049 China Abstract The relationship between the ion energy flux colliding on the material surface and the plasma density is investigated. Based on the radio frequency sheath model, the equations for ion velocity, density, and energy flux colliding on the material surface are derived. The effect of plasma density on the ion energy flux is analyzed. The experimental data are in agreement with the theoretical analysis and verify the analysis. Plasma density plays dual effects on ion energy flux, including the restraint of the ion energy in the sheath and the impelling of the ion number colliding on the material surface. When the plasma density is relatively low, the former plays a dominant role and its effect on energy flux is significant; as plasma density grows higher, the latter plays a more important role and the effect of plasma density tends towards weaker. Keywords Plasma, density, ion, surface, energy flux 在等离子体加工中 被加工表面附近
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