选择性溶解在微加工的应用.PDFVIP

選擇性溶解在微加工的應用 防蝕工程　第二十一卷第一期　第 57 ~ 62 頁　2007 年3 月 Journal of Chinese Corrosion Engineering, Vol. 21, No. 1, pp. 57 ~ 62 (2007) 1 2 2 1 陳振榕 、付燕 、林昌健 、蔡文達* Selective Dissolution in Micro-scale Structure Machining 1 2 2 1 Jhen-Rong Chen , Fu Yan , Chang-Jian Lin , Wen-Ta Tsai* 本研究主要利用 2205 雙相不銹鋼於硫酸與鹽酸之混合水溶液中選擇性溶解的特性， 製作微米級濾網及柱狀結構體。根據動電位極化測試結果顯示，在活性-鈍態轉換區存在兩 個明顯且分離的陽極峰。在較高電位的陽極峰會發生沃斯田體相優先溶解的現象；反之， 在較低陽極峰電位下則肥粒體相溶解速率遠大於沃斯田體相。利用上述特性，可以製作微 米級濾網、柱狀單晶體，或達到微米級之表面粗化效果。 關鍵字：雙相不銹鋼；選擇性溶解；微結構加工。 ABSTRACT Selective dissolution of 2205 duplex stainless steel (DSS) in H SO /HCl mixed solution can 2 4 be employed for the fabrication of micro-scale mesh and rod. According to the result of the potentiodynamic polarization test, there exist two distinct and separated anodic peaks in the active- to-passive transition region. Potentiostatic etching at the higher peak potential could result in preferential dissolution of austenitic (γ) phase. On the other hand, the ferritic (α) phase has greater dissolution rate than that of austenitic phase at the lower peak potential. Employing such unique characteristics, the micro-scale mesh and rod could be obtained after potentiostatic etching. Keywords ：Duplex stainless steel, Selective dissolution, Micro-scale machining. ˍˍˍˍˍˍˍˍˍˍˍˍˍˍ