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Non-contact position control via fluid shear force.pdf

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Non-contact position control via fluid shear force.pdf

Precision Engineering 45 (2016) 463–468 Contents lists available at ScienceDirect Precision Engineering journal homepage: /locate/precision Technical note Non-contact position control via ?uid shear force Edward Sung a,?, Brandon Chalifoux a, Jay Fucetola a, Mark L. Schattenburg b, Ralf K. Heilmann b a Department of Mechanical Engineering, Massachusetts Institute of Technology, 70 Vassar St. 37-276, Cambridge, MA 02139, USA b Space Nanotechnology Lab, MIT Kavli Institute, 70 Vassar St. 37-276, Cambridge, MA 02139, USA article info Article history: Received 21 February 2014 Received in revised form 8 February 2016 Accepted 25 February 2016 Available online 11 March 2016 Keywords: Non-contact Shear force Air bearing Slumping Glass Machine vision High temperature abstract Non-contact position control of components is bene?cial to avoid wear, damage, and nonlinearities associated with friction. Air bearings, in particular, offer non-contact, high stiffness guidance, but no means of controlling the position of the supported component. In this work, we investigate the use of shear force resulting from the air bearing ?uid ?ow as a means of actuation. Shear force actuation is tested in an air bearing slumping system, where a ?at, horizontally placed glass substrate is supported on both sides by top and bottom air bearings. We investigate the use of two methods of substrate position sensing: a ?ber-optic sensor and a machine vision sensor. We show that the glass substrate position can be successfully controlled by using ?uid shear force. The magnitude of the ?uid shear force is measured. System identi?cation is performed, and the results are shown to agree with a second-order model. ? 2016 Elsevier Inc. All rights reserved. 1. Introduction Frictionless mechanical elements and actuators are highly desirable in precision machines, where nonlinearity and hysteresis arising from friction can have a signi?cant impact on positioning repeatability and accuracy. While frictionless