Non-contact resistance measurement of transparent electrodes deposited on flexible display substrates under repetitive bending test by terahertz time domain spectroscopy.pdfVIP

Displays 45 (2016) 58–62 Contents lists available at ScienceDirect Displays journal homepage: /locate/displa Non-contact resistance measurement of transparent electrodes deposited on ?exible display substrates under repetitive bending test by terahertz time domain spectroscopy Bor-Jiunn Wen a,?, Tze-An Liu b, Hsing-Cheng Yu c, Shih-Fang Chen b, Yuh-Chuan Cheng b a Department of Mechanical and Mechatronic Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan b Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu 30011, Taiwan c Department of Systems Engineering and Naval Architecture, National Taiwan Ocean University, Keelung 20224, Taiwan article info Article history: Received 31 October 2014 Received in revised form 30 January 2016 Accepted 30 January 2016 Available online 13 February 2016 Keywords: Non-contact resistance measurement Bending test Terahertz time domain spectroscopy Four-point probe Flexible characteristic inspection system abstract The objective of this study is to put forward a new non-contact resistance measurement method for repeating bending tests of transparent electrodes deposited on ?exible display substrates. The study utilizes a terahertz time domain spectroscopy (THz-TDS) method to measure electrical properties of ?exible polyethylene terephthalate/indium tin oxide samples up to 20,000 bending times. In addition, this study utilizes THz-TDS method to measure electrical characteristics of ?exible substrates with hard-coat ?lms. Accordingly, the percentage errors of measured sheet resistances based on THz-TDS method are less than or equal to 5.5% for comparison with a contact type four-point probe method or our previously reported ?exible characteristic inspection system method. The values show a reasonable agreement with contactmode sheet resistance measurements. Therefore, the electrical properties of thin ?lms are measured offline or online easily by using this method. ó 2016 Elsevier B.V. All