IBM-Audit-Report..docVIP

-Overall Rating : Not Acceptable 总体等级：无法接受 Reason for Audit: Qualification of Fushun Microelectronics Co. Ltd, 4 inch Fab, 5um Bipolar process for UTC 431. 审核目的：对福顺微电子有限公司4英寸厂5 um双极工艺的UTC431品种审核。 KEY: I = Improvement Area需要改进的方面 M = Minor Concern must be Addressed轻微不良 C = Major Concerns must be Addressed Immediately严重不良 R = Request for information需要提供更加详细的资料 P = Positive practice有特色（值得肯定）的方面 Summary of Items Presented at Audit Wrap-up Rating 等级 Description of Item内容描述 C-1 严重 不良 Calibration : 仪器校验 - Accuracy of Nanospec/AFT is checked daily and recorded in log sheet with spec 8665~8945A of standard wafer. 12/4 morning reading = 8722, 12/4 aftenoon reading when audited = 9174 (out of spec), but operator measured the out of indicated area on wafer, 2nd reading in the indicated area = 15,126 (way out of spec), 3rd in the indicated area = 7,886 (again out of spec). - Accuracy of 4 point probe (FPP5000) is checked with 7.45+/-0.1 daily as well. At the audit, operator demonstated the reading at 4 different points on wafer, 7.36, 7.22 (out of spec), 7.29 (out of spec), 7.35, then engineer took over reading and his results were 7.33 (out of spec), 7.20 (out of spec), finally 7.36 after reset the tool. - No close loop tracking system to control equipment calibration status. For example, equipment calibration schedule only updated at the end of year. No calibration record for Tektronics 572 which has been used for PCM test. 膜厚测试仪的精度校验：每日都有用标准片（范围8665~8945A）进行精度校验，并在记录本上做相应记录：12月4日早上记录8722A。12月4日下午审核的时候，读数却是9174A（超出了范围）。操作员的测试超出范围，第二次读数显示15126A（超出范围），第三次7886A（还是超出范围）。 四探针（FPP5000）测试仪的精度校验：每日校验在7.45±0.1Ωcm。在审核的时候，操作员测量了四个不同的点：7.36；7.22（超出范围）；7.29（超出范围）；7.35 。当工程师再测量时，读数是：7.33（超出范围）；7.20（超出范围）；最后，经过调整仪器之后，读数是7.36。 对于控制仪器校验状态，没有一个闭环的跟踪控制体系。比如，设备检验计划仅仅在年底才更新。 C-2 严重 不良 PCN : No PCN procedure to inform and to get customer approval of major changes. 工艺变更通知：对于主要的（工艺）变更，没有规定程序文件，以便通知客户并得到客户认可。 PCN ==Process Changes Notice 工艺变更通知（参见最后的备注） 严重不良 C-3 Maintenance : Lamp in