新型惯性式压电驱动机构的研究.pdfVIP

14 4 V ol . 14 N o. 4 2006 8 O ptics and Precisio n Eng ineer ing Aug. 2006 1004924X 2006) 曾 平, 温建明, 程光明, 吴博达, 杨志刚 吉林大学机械工程学院, 吉林 长春 130025) : , , , , , 1 mm/ s, 20 nm , 1 000 g : P ZT ; 压电驱动器; 微驱动器; 惯性; 摩擦 : T N384 ; T H 70 3. 6 : A Research on novel inertial piezoelectric actuator ZEN G P ing, WEN Jianming, CH EN G Guangm ing, WU Boda, Y A N G Zhig ang (College of M echanical Science and Engineering, Jilin University , Changchun 130025, China) Abstract: Based on cont rolling t he o rderly changes of t he PZT moving m echanism and f rict ion bet w een support ing f aces in mechanical w ay, a kind o f inert ial piezoelect ric act uato r w as pro posed . T he rela t ionship bet w een t he dr iv ing vo ltag e and t he driving for ce and t he dist ance w er e analy zed, t he str uc t ure of a new inertial piezoelect ric act uat or t hat can realiz e single dimension r eciprocating mo tion w as designed and manuf act ured. T he ex perim ent al result s show t hat t he simple associat ed symm et ry elec t rical sig nal can pr ovide stable st epping m ovement w it h t he speed o f 1 m m/ s , high resolut ion of 20 nm and max imum lo ading capacit y of 1 000 g , it is ex pect ed t hat t he pro posed actuato r w ill be w idely ap plied to precision indu st ry. Key words: PZ T ; piezoelect ricit y act uat or; m icroactuat or; inert ial dr iv e; f rict ion , 1 引 言 ; , SM A) , M EM S , :; : 20060918