用于Raman光谱和微纳米结构同步检测的Raman-AFM系统研究.pdfVIP

光学仪器与技术 用于Raman 光谱与微纳米结构同步检测的 Raman-AFM系统研究* 史 斌，章海军，吴 兰，张冬仙* 浙江大学现代光学仪器国家重点实验室，杭州310027 摘要：本文研究和发展了一种将微区拉曼（Raman ）光谱检测与原子力显微镜（AFM ）微纳米扫描成像 相结合的新型Raman-AFM技术。设计了Raman光谱与AFM 扫描成像的原位检测探头；研制出相应的 Raman-AFM系统；利用该系统，对ZnO纳米颗粒和TiO2纳米薄膜开展了微区Raman光谱与微纳米结构的 检测实验。研究表明，所获得的Raman光谱检测结果与理论值良好吻合，同时，AFM扫描检测得到的图 像很好地表征了样品的微纳米结构，从而实现了微区Raman光谱与AFM 图像的原位及同步检测，验证了 这一技术的可行性，为Raman光谱技术与微纳米技术领域的实际应用提供了技术基础。 关键词 光学； Raman 光谱；AFM ；微区 中图分类号：TB96 文献标识码： Study of the Raman–AFM system for simultaneous measurements of Raman spectrum and micro/nano-structures SHI Bin, ZHANG Hai-jun, WU Lan, ZHANG Dong-xian State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou 310027, China Abstract: This paper proposes a novel technique of Raman-atomic force microscopy (AFM) combining micro region Raman spectroscopy and AFM imaging. An in-situ probe unit which can simultaneously realize the detection of Raman spectrum and the measurement of AFM image is designed, and a related Raman-AFM system is constructed. Using this system, some experiments are carried out to acquire micro region Raman spectra and AFM images of ZnO nano-particle and TiO2 film. The results show that the Raman spectra of both samples are in agreement with theoretical values, and the AFM images represent their micro/nano-structures quite well. These researches prove the feasibility of the Raman-AFM technique which has the potential of being widely applied in the fields of Raman spectroscopy and micro/nano-technology. Keywords ：optics; Raman spectroscopy; AFM; micro region; 引 言 [1, 2] 拉曼（Raman ）光谱 检测作为一种特殊的光谱检测技术，能够提供样品的化学成分和物质结构等 信息[3]，并可对样品进行定性或定量分析，具有制样