大位移多折叠梁静电驱动器设计及力学性能分析_赵江铭.pdfVIP

Journal of Mechanical Strength 2007, 29( 1) :005~ 011 X DESIGN AND MECHANICAL CHARACTER ANALYSE OF A NOVEL TYPE OF MICRO ELECTROSTATIC ACTUATOR WITH MULTI-FOLDED SUSPENSIONS XX 1, 2 1 1 ( 1. 上海大学 机电工程与自动化学院, 上海200072) ( 2. 郑州大学 机械工程学院, 郑州450001) 1, 2 1 1 ZHAO JiangMing CHEN XiaoYang WANG XiaoJing ( 1. S chool of Electromechanical E ngineering A utomation , Shanghai University , Shanghai 200072, China) ( 2. S chool of M echanical Engineering , Zhengz hou University , Zhengz hou 450001, China) , , , , , 7 ~ 14 , 4 ~ 9 TP212 Abstract The existing micro electrostatic comb resonatorswor ing as actuators can only output little displacement, the authors de- veloped a novel type of micro electrostatic actuator with mult-i folded suspensions, which would be able to output large displacement and wor in both the static and resonance state. The mechanical analytic model was developed, and the analytic expressions of the displace- ment, the stiffness coefficient and the resonance frequency were stated aswell. Comparing with the commonly used straight leg and crag leg resonators, the analytical results showed that, the displacement output could be improved to 7~ 14 times at the same driving voltage, and the ability of displacement output can be enhanced to 4~ 9 times under the same maximum stress. Key wor s Micro electro-mechanical system; Micro electrostatic actuator; larger isplacement output; Structure esign