扩散硅压力传感器迟滞建模及补偿研究硕士论文.doc

硕 士 学 位 论 文 题目 扩散硅压力传感器Modeling and Compensation for Hysteresis of Diffused Silicon Pressure Sensor 摘 要 扩散硅压力传感器是目前用于测量压力的一种重要传感器，被广泛应用于工业、农业、气象部门、航天航空等领域。随着半导体技术的发展，扩散硅压力传感器的各项技术指标不断提高，但扩散硅压力传感器本身固有的非常规、多值对应的迟滞非线性特性，限制了其测量精度。目前国内外针对传感器迟滞特性的研究还比较少，已有文献证明不能直接使用神经网络对其进行建模，大部分学者的工作是把迟滞非线性当作一般非线性处理，其结果不能满足补偿精度的要求。因此本文引入迟滞算子的概念，建立T-S模糊动态迟滞模型，实现对迟滞的智能补偿，并在此基础上设计了基于ARM的嵌入式智能扩散硅压力传感器补偿系统，本文主要获得如下成果： 1. 借鉴提升输入维数的思想，引入一个迟滞算子，将迟滞非线性的多值映射转化为单值映射，建立一个基于算子的T-S模糊动态迟滞模型，该模型具有结构简单、易于辨识算法等优点。 2. 引入与迟滞算子作用类似的迟滞逆算子，将多值映射转化为单值映射，建立一个基于逆算子的T-S模糊动态迟滞逆模型，将该逆模型置于被补偿对象后面进行迟滞非线性补偿，实现了对扩散硅压力传感器的智能补偿。 3. 在32位ARM微处理器的EM9000嵌入式模块平台上，设计了Windows CE嵌入式扩散硅压力传感器补偿系统，完成了嵌入式扩散硅压力传感器系统的设计与开发，并结合迟滞智能补偿原理，实现了对扩散硅压力传感器高精度测量的实时性要求，与未补偿的扩散硅压力传感器迟滞相比精度提高了约四倍，证明了建立的T-S模型是非常有效性的。 关键词：迟滞算子，T-S模糊模型，嵌入式系统，Windows CE，ARM Abstract The diffused silicon pressure sensor is an important device to measure the pressure，which has been widely used in the field of industry, agriculture, meteorology, aviation and so on. With the development of semiconductor technology, the performance of diffused silicon pressure sensor is improving. However, The hysteresis characteristic of diffused silicon sensor is a kind of non-smooth non-linearity with mult-ivalued mapping, which reduces the precision of measurement. Up till now, few authors study the hysteresis of sensors and published literature proved that neural networks can’t approximate the hysteresis non-linearity directly. The compensation for the hysteresis of the sensor usually employs the conventional methods, but the methods can’t totally meet the requirment of compensation precision. Therefore, a hysteretic operator of simple structure is introduced to establish the hysteresis model and put forward to make intelligent compensation to the hysteresis. Hence, an embedded smart diffused silicon pressure sensor system based on ARM is designed, and the main results are as follows: 1. The hysteretic operator based on the input extended s