一种高性能非蒸散型吸气剂的性能分析.pdfVIP

第44卷

第6期真空科学与技术学报

2024

年

6

月CHINESE

JOURNAL

OF

VACUUM

SCIENCE

AND

TECHNOLOGY503

一种高性能非蒸散型吸气剂的性能分析

1111112*

王国栋刘霄王姣龙蔡洋洋张峰陈长琦谢远来

(1.

合肥工业大学

机械工程学院

合肥

230009；2.

中国科学院合肥物质科学研究院

等离子体物理研究所

合肥

230031)

PerformanceAnalysisofaHigh-PerformanceNon-EvaporableGetter

1111112*

WANG

Guodong，LIU

Xiao，WANG

Jiaolong，CAI

Yangyang，ZHANG

Feng，CHEN

Changqi，XIE

Yuanlai

(1.

SchoolofMechanicalEngineering,HefeiUniversityofTechnology,Hefei230009,China;

2.

InstituteofPlasmaPhysics,HefeiInstituteofPhysicalScience,CAS,Hefei230031,China)

AbstractNon

evaporable

getters

(NEGs)

are

important

materials

for

maintaining

vacuum

in

high

and

ultra-

high

vacuum

systems,

with

high

stability

and

gas

adsorption.

This

article

uses

the

powder

metallurgy

method

to

prepare

ZrVAl,

and

builds

a

high

vacuum

system

for

testing

based

on

the

small

hole

flow

conductivity

59.4629.8110.73

method.

The

effects

of

gas

type

and

working

temperature

on

the

performance

are

tested.

Through

experiments,

it

is

known

that

ZrVAl

has

good

suction

performance

for

H,

CO,

and

N,

and

has

the

best

performance

for

H

,

59.4629.8110.732222

but

it

does

not

absorb

inert

gases

such

as

He.

At

the

same

time,

it

indicates

that

the

working

temperature

has

a

significant

impact

and

the

optimal

working

temperature

is

200