大宗气体纯化及输送系统工程技术规范.docxVIP

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目次

1总则 (1)

2术语 (2)

3站房布置 (5)

4工艺系统 (7)

5设备选择 (9)

6高纯气体输送系统 (11)

6.1一般规定 (11)

6.2管道设计 (11)

6.3管材及附件 (12)

6.4安全及标志 (13)

7建筑结构 (14)

8采暖通风与空气调节 (15)

9给水排水及消防 (16)

10电气及仪表控制 (17)

11施工及验收 (19)

11.1一般规定 (19)

11.2气体纯化站的施工 (20)

11.3高纯气体输送系统的施工 (21)

11.4改、扩建工程的施工 (25)

11.5工程验收 (25)

附录A高纯气体用BA、EP不锈钢管道技术要求 (30)

附录B高纯气体管道氦检漏方法 (33)

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附录C施工验收测试记录表 (34)

本规范用词说明 (40)

引用标准名录 (41)

附：条文说明 (43)

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Contents

1Generalprovisions (1)

2Terms (2)

3Purificationstationlayout (5)

4Processsystem (7)

5Equipmentselection (9)

6Deliverysystemofhighpuritygas (11)

6.1Generalrequirement (11)

6.2Pipingdesign (11)

6.3Pipingmaterialsandaccessories (12)

6.4Safetyandidentification (13)

7Architectureandstructure (14)

8Heating,rentilationandairconditioning (15)

9Watersupplyanddrainageandfirefighting (16)

10Electricalandinstrumentcontrols (17)

11Constructionandacceptance (19)

11.1Generalrequirement (19)

11.2Constructionofpurificationstation (20)

11.3Constructionofdeliverysystemofhighpuritygases (21)

11.4Constructionofreconstructionandextensionworks (25)

11.5Acceptanceofworks (25)

AppendixATechnicalspecificationforBA、EPpipe (30)

AppendixBDetectionmethodofheliumleakagein

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highpuritygaspipes (33)

AppendixCRecordsheetsofsystemtestand

acceptance (34)

Explanationofwordinginthiscode (40)

Listofquotedstandards (41)