GB/T 44839-2024微机电系统（MEMS）技术　MEMS材料微柱压缩试验方法.pdf

ICS

31.080.99

CCS

L59

中华人民共和国国家标准

GB/T44839—2024/IEC62047﹘10:2011

微机电系统（MEMS）技术

MEMS材料微柱压缩试验方法

Micro-electromechanicalsystems（MEMS）

technology—

Micro-pillarcompressiontestforMEMSmaterials

（IEC62047-10:2011,Semiconductordevices—Micro-electromechanical

devices—Part10:Micro-pillarcompressiontestforMEMSmaterials,IDT）

2024-10-26发布2025-02-01实施

国家市场监督管理总局

发布

国家标准化管理委员会

GB/T44839—2024/IEC62047﹘10:2011

目次

前言

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范围

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2

规范性引用文件