硅表面功能化结构制造技术及实验研究机械制造及其自动化专业论文.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 - - II - Abstract Since the late 1980s when nano-technology began developed, it has more and more important applications in the field of information, materials, biotechnology, microelectronics and micro-fabrication, and it has become one of the most important science and technology fronts concerned by the world. With nano-technology development, design and build with a specific function and characteristics of the nano-structure assembly became very interested in the research focus. Along with electronic devices become more and more miniaturized, the demand for the nano-structure is increasing urgently, and people has carried on the widespread exploration and the research. Through this molecular self-assemble technology, and nano-materials, as a unit, can effectively build a nano- or micro-scale functional structure. In this paper the chemomechanical method was used to scribe the silicon surface in the present of aryldiazonium salt, so we can connect the silicon and the arenes with covalent bond, and realize simultaneously functionaliz ed and patterned silicon. This provided experiment basis for building nano-scale functional structure. (1)At first we analyze the reaction mechanism of Silicon and Renediazonium Salt, Olefin, Alkyl Halides and Alcohols, then compare the assembling monolayers’ difficulty and the stability of monolayers in various materials. (2)we do the silicon’s controlled self-assembly experiments in the solution, research the cutting tools, cutting force size and other three main factors on the department to the self-assembled monolayers’ quality(SAMs), summed up more parameters suitable for the film growth. (3)Using X-ray photoelectron spectroscopy(XPS) and infrared spectroscopy to test the self-assembled monolayers and Atomic Force Microscopy(AFM) to characterize the surface morphology. Prove that this method can efficiently achieve simultaneously functionalizing and patterning silicon. (4)we connect the ssDNA to the